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引用本文:   符靓, 施树云, 陈晓青. 电感耦合等离子体-质谱法测定高纯四甲基氢氧化铵中超痕量金属元素. 分析化学, 2018, 46(1): 107-112. doi:  10.11895/j.issn.0253-3820.171061 [复制]

Citation:   FU Liang, SHI Shu-Yun, CHEN Xiao-Qing. Ultra-trace Metal Elements Analysis of High Purity Tetramethylammonium Hydroxide Using Inductively Coupled Plasma Tandem Mass Spectrometry. Chinese Journal of Analytical Chemistry, 2018, 46(1): 107-112. doi: 10.11895/j.issn.0253-3820.171061 [复制]

电感耦合等离子体-质谱法测定高纯四甲基氢氧化铵中超痕量金属元素

通讯作者:  陈晓青, syshicsu@163.com

收稿日期: 2017-07-03

接受日期: 2017-10-30

出版日期: 2018-01-20

基金项目: 本文系国家自然科学基金项目(No.21275163)、重庆市科委前沿与应用基础研究项目(No.cstc2015jcyjA10038)和重庆市教委重点科研项目(No.KJ1601224)资助

Ultra-trace Metal Elements Analysis of High Purity Tetramethylammonium Hydroxide Using Inductively Coupled Plasma Tandem Mass Spectrometry

Corresponding author:  CHEN Xiao-Qing, syshicsu@163.com

Received Date:  2017-07-03

Accepted Date:  2017-10-30

Published Date:  2018-01-20

Fund Project:  This work was supported by the National Natural Science Foundation of China (No. 21275163), the Chongqing Municipal Science and Technology Frontier and the Application of Basic Research Project (No. cstc2015jcyjA10038), and the Scientific and Technological Research Program of Chongqing Municipal Education Commission (No. KJ1601224)

建立了高纯四甲基氢氧化铵(TMAH)中超痕量金属元素的分析方法。25%(w/w)高纯TMAH溶液样品经超纯水稀释后直接进样,应用电感耦合等离子体串联质谱(ICP-MS/MS)法测定其中12种超痕量金属元素。在MS/MS模式下,分别向碰撞/反应池(CRC)中加入O2和NH3-He(1:9,V/V),消除质谱干扰,采用O2质量转移法对Cr、Mn、Ni和Mo进行测定,O2原位质量法对Cd和Pb进行测定,NH3质量转移法对Fe、Co、Cu和Zn进行测定,NH3原位质量法对Mg和Al进行测定。12种金属元素的检出限为0.3~57.2 ng/L,加标回收率在92.0%~106.0%之间,相对标准偏差(RSD)≤4.6%,表明本方法具有良好的准确性和精密度。本方法已成功应用于25%高纯TMAH溶液中超痕量金属元素的分析。

关键词:   四甲基氢氧化铵, 电感耦合等离子体串联质谱, 金属元素, 质量转移法, 原位质量法
Key words:   Tetramethylammonium hydroxide, Inductively coupled plasma tandem mass spectrometry, Metal elements, Mass shift, On mass
[1]

Biswas K, Kal S. Microelectron. J., 2006, 37(6): 519-525. doi: 10.1016/j.mejo.2005.07.012

[2]

Henschel W, Georgiev Y M, Kurz H. J. Vac. Sci. Technol. B, 2003, 21(5): 2018-2025. doi: 10.1116/1.1603284

[3]

Fan Y, Han P, Liang P, Xing Y, Ye Z, Hu S. Appl. Surf. Sci., 2013, 264(1): 761-766

[4]

Peterman M C, Noolandi J, Blumenkranz M S, Fishman H A. P. Natl. Acad. Sci. USA, 2004, 101(27): 9951-9954. doi: 10.1073/pnas.0402089101

[5]

Venkatesh R P, Kwon T Y, Prasad Y N, Ramanathan S, Park J G. Microelectron. Eng., 2013, 102(1): 74-80

[6]

SEMI C46-0306, Guideline for 25% Tetramethylammonium Hydroxide. Semiconductor Equipment and Materials International

[7]

CHEN Xue, WANG Jun, FENG Liu-Xing, YANG Xiao-Jin. J. Chin. Mass Spectrom. Soc., 2016, 37(1): 31-36. doi: 10.7538/zpxb.youxian.2015.0049

陈雪, 王军, 冯流星, 杨晓进. 质谱学报, 2016, 37(1): 31-36. doi: 10.7538/zpxb.youxian.2015.0049

[8]

NIE Xi-Du, FU Liang. Spectroscopy and Spectral Analysis, 2017, 37(3): 910-913

聂西度, 符靓. 光谱学与光谱分析, 2017, 37(3): 910-913

[9]

Liu Z, Li X, Xiao G, Chen B, He M, Hu B. TrAC-Trends Anal. Chem., 2017, 93: 78-101. doi: 10.1016/j.trac.2017.05.008

[10]

Hattendorf B, Gunther D. J. Anal. At. Spectrom., 2004, 19(5): 600-606. doi: 10.1039/B312155K

[11]

Yip Y, Sham W. TrAC-Trends Anal. Chem., 2007, 26(7): 727-743. doi: 10.1016/j.trac.2007.03.007

[12]

D'Ilio S, Violante N, Majorani C, Petrucci F. Anal. Chim. Acta, 2011, 698(1-2): 6-13. doi: 10.1016/j.aca.2011.04.052

[13]

HAN Jian-Hua, SUN Chuan-Qiang, WANG Yan, ZHAO Xue-Hong, CAI Biao. Metal. Anal., 2014, 34(9): 1-7

韩建华, 孙传强, 汪曣, 赵学玒, 蔡彪. 冶金分析, 2014, 34(9): 1-7

[14]

LIU Hong-Wei, ZHANG Ping, HU Han-Xiang. Chinese J. Anal. Chem., 2014, 42(6): 913-917

刘宏伟, 张萍, 胡汉祥. 分析化学, 2014, 42(6): 913-917

[15]

Caumette G, Lienemann C P, Merdrignac I, Paucot H, Bouyssiere B, Lobinski R. Talanta, 2009, 80(2): 1039-1043. doi: 10.1016/j.talanta.2009.08.017

[16]

Balcaen L, Woods G, Resano M, Vanhaecke F. J. Anal. Atom. Spectrom., 2013, 28(1): 33-39. doi: 10.1039/C2JA30265A

[17]

FU Liang, SHI Shu-Yun. Chinese J. Anal. Chem., 2017, 45(8): 1222-1226. doi: 10.11895/j.issn.0253-3820.170220

符靓, 施树云. 分析化学, 2017, 45(8): 1222-1226. doi: 10.11895/j.issn.0253-3820.170220

[18]

Deitrich C L, Cuello-Nunez S, Kmiotek D, Torma F A, del Castillo Busto M E, Fisicaro P, Goenaga-Infante H. Anal. Chem., 2016, 88(12): 6357-6365. doi: 10.1021/acs.analchem.6b00715

[19]

Balcaen L, Bolea-Fernandez E, Resano M, Vanhaecke F. Anal. Chim. Acta, 2015, 894: 7-15. doi: 10.1016/j.aca.2015.08.053

[20]

He Q, Xing Z, Wei C, Fang X, Zhang S, Zhang X. Chem. Commun., 2016, 52(69): 10501-10504. doi: 10.1039/C6CC04793A

[21]

Quemet A, Brennetot R, Chevalier E, Prian E, Laridon A L, Mariet C, Fichet P, Laszak I, Goutelard F. Talanta, 2012, 99: 207-209. doi: 10.1016/j.talanta.2012.05.041

[22]

Fu L, Shi S Y, Chen X Q. Spectrochim. Acta B, 2017, 133: 34-39. doi: 10.1016/j.sab.2017.05.001

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电感耦合等离子体-质谱法测定高纯四甲基氢氧化铵中超痕量金属元素

符靓, 施树云, 陈晓青

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